Books  Physical Sciences  Engineering & Materials Science 

An Introduction to Surface-Micromachining

By: Robert W Johnstone (Author), Ash Parmaswaran (Author)

Kluwer Academic Publishers

Hardback | Dec 2004 | #151709 | ISBN: 1402080204
Availability: Expected dispatch within 3-4 days Details
NHBS Price: £123.00 $150/€138 approx

About this book

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. An Introduction to Surface-Micromachining will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

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