560 pages, b/w illustrations
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They may integrate sensing and actuating with information processing, analog-to-digital conversion and memory functions. Smart sensors and MEMS may respond to algorithmic instructions and calibration requests, allowing smart devices to become more autonomous as they provide self-diagnostics and self-correction. Intelligence enables adaptation, which in turn increases the reliability and longevity of the smart device and this can significantly reduce costs. Part one covers smart sensors including capacitive, inductive, resistive and image sensors. Part two covers smart MEMS, including power MEMS, RF MEMS, inertial MEMS, and MEMS print heads.
Part 1 Smart sensors for industrial applications: What makes sensor devices and microsystems 'intelligent' or 'smart'? Direct digital interface circuits for sensors
- Capacitive sensors for displacement measurement in the sub-nanometer range
- Integrated inductive displacement sensors for harsh industrial environments
- Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range
- Integrated polarization analyzing CMOS image sensors for detection and signal processing
- Advanced interfaces for resistive sensors
- Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications
- Advanced optical incremental sensors: encoders and interferometers
Part 2 Smart micro-electro-mechanical systems (MEMS) for industrial applications: Microfabrication technologies used for creating smart devices for industrial applications
- Microactuators: Design and technology
- Dynamic behavior of smart MEMS in industrial applications
- MEMS integrating motion and displacement sensors
- MEMS print heads for industrial printing
- Photovoltaic and fuel cells in power MEMS for smart energy management
- Radio frequency (RF)-MEMS for smart communication microsystems
- Smart acoustic sensor array (SASA) system for real-time sound processing applications
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Dr Stoyan Nihtianov is an Associate Professor at the Delft University of Technology, The Netherlands. Dr Antonio Luque is an Associate Professor at the University of Seville, Spain.