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An Introduction to Surface-Micromachining

By: Robert W Johnstone(Author), Ash Parmaswaran(Author)

Kluwer Academic Publishers

Hardback | Dec 2004 | #151709 | ISBN: 1402080204
Availability: Usually dispatched within 1-2 weeks Details
NHBS Price: £109.99 $142 / €126 approx

About this book

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. An Introduction to Surface-Micromachining will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

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